Case Study

Development of “Sensor Head-separation type” sCMOS camera for soft X-ray, EUV, etc. under vacuum conditions​

We have jointly developed a “Sensor Head-separation type sCMOS camera“ in collaboration with ARTRAY Co., Ltd.​

Since the sensor-head and the camera body are separated, it is possible to easily install only the sensor-head into a vacuum environment.​


R&D of soft X-ray/EUV conducted in a vacuum environment

  • No suitable camera that is easy to use and install
  • Limited space for installation
  • Lacking in support for use (measures for outgassing, etc.).​


  • Only the sensor-head can be installed into a vacuum environment by separating the sensor-head from the camera body, and it makes easier to set up the camera.​
  • R&D of Soft X-ray/EUV is facilitated by using a sensor sensitive to UV-area.

case study details

In response to requests for easy-to-use cameras to conduct experiments in a vacuum environment from universities and R&D institutions that conduct soft X-ray and EUV research, we have developed a “Sensor Head-separation type camera" with Gpixel/GSENSE400BSI which has sensitivity in UV-area, and that makes installing the sensor-head in a vacuum environment easier compared to the existing “Standard vacuum camera" and “Flange-mounted camera“ .

Comparison of each type

Head-separation type​Standard typeFlange mount type
Variation of camera for vacuum conditions​
Because of small sensor-head, installation position is flexible in vacuum chamber​Requires large space in vacuum chamber​Sensor installation position is limited to flange position​
Difficulty in​
CMOS/digital output can use long-cable without noise increase.​
  • Choice of vacuum available parts, case is necessary.​
  • Anti-heat measurement is necessary.​
  • Choice of vacuum available parts, case is necessary.​
  • Anti-heat measurement is necessary.​

Special features of Sensor Head-separation type sCMOS camera

  • Camera body does NOT require vacuum support.​
  • High flexibility for installation in vacuum chamber as flange and sensor head are cable-connected.​
  • Refrigerating sensor in a vacuum environment is possible with Peltier cooling-system equipped in the sensor head.​

Special features of GSENSE400BSI CMOS-image sensor​

  • 2k x 2k BSI s (Scientific)-CMOS image-sensor​
  • Peak QE : 95%@580nm​
  • Ultra low read noise, 1.2e-, High dynamic range up to 97.78dB​
  • Many supply experiences to universities & institutions for EUV, soft X-ray use​
We will listen to needs of our customers, and we can propose optimal products based on the Kanematsu Group global network and many years of technical capabilities.​